Silicon tetrahydride — workplace exposure limit
What is the niosh rel (ppm) for Silicon tetrahydride — workplace exposure limit?
For Silicon tetrahydride, niosh rel (ppm) is TWA 5; niosh rel (mg/m³) is 7; cas no. is 7803-62-5, verified against its source on 2026-09-08.
NIOSH REL TWA 5 ppm (7 mg/m3)
— cdc.gov, retrieved 2026-09-08
- Substance
- Silicon tetrahydride verified
- CAS No.
- 7803-62-5 verified
- NIOSH REL (ppm)
- TWA 5 verified
- NIOSH REL (mg/m³)
- 7 verified
- PEL (ppm)
- 5 per dir.ca.gov
- PEL (mg/m³)
- 7 per dir.ca.gov
Where each value comes from
This source states these in separate places, so each value is shown with the passage that states it.
Substance
CDC - NIOSH Pocket Guide to Chemical Hazards - Silicon tetrahydride
CAS No.
CAS No. 7803-62-5
— all from cdc.gov, retrieved 2026-09-08
What dir.ca.gov says
7803625 | | Silicon tetrahydride; silane | 5 | 7
— dir.ca.gov, retrieved 2026-08-05
Sources
- cdc.govhttps://www.cdc.gov/niosh/npg/npgd0556.html
- dir.ca.govhttps://www.dir.ca.gov/title8/5155.html