Reference Source

ISO 18516:2006

For ISO 18516:2006, item title is Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution; status code is 9599; successor is ISO 18516:2019; withdrawn / published date is 2006-10-19, recorded from its source on 2026-08-05.

Identifier
ISO 18516:2006 verified
Item title
Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution verified
Status code
9599 verified
Successor
ISO 18516:2019
Withdrawn / published date
2006-10-19 verified
Sourceisopublicstorageprod.blob.core.windows.net
Verified
Review by
DatasetWithdrawn and superseded ISO standards

What the source says

38723,IS,,ISO 18516:2006,Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution,Analyse chimique des surfaces — Spectroscopie d'électrons Auger et spectroscopie de photoélectrons de rayons X — Détermination de la résolution latérale,2006-10-19,1,['71.040.40'],ISO/TC 201/SC 2,9599,,[63863],"['en','fr']",24,"<p>ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The gr

isopublicstorageprod.blob.core.windows.net, retrieved 2026-08-05

Source

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