# ISO 18516:2006 — Withdrawn and superseded ISO standards

For ISO 18516:2006, item title is Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution; status code is 9599; successor is ISO 18516:2019; withdrawn / published date is 2006-10-19, recorded from its source on 2026-08-05.

- **Identifier:** ISO 18516:2006 _(verified: appears in the quote below)_
- **Item title:** Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution _(verified: appears in the quote below)_
- **Status code:** 9599 _(verified: appears in the quote below)_
- **Successor:** ISO 18516:2019
- **Withdrawn / published date:** 2006-10-19 _(verified: appears in the quote below)_

## What the source says

> 38723,IS,,ISO 18516:2006,Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution,Analyse chimique des surfaces — Spectroscopie d'électrons Auger et spectroscopie de photoélectrons de rayons X — Détermination de la résolution latérale,2006-10-19,1,['71.040.40'],ISO/TC 201/SC 2,9599,,[63863],"['en','fr']",24,"<p>ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The gr

## Source

- https://isopublicstorageprod.blob.core.windows.net/opendata/_latest/iso_deliverables_metadata/csv/iso_deliverables_metadata.csv

Last verified: 2026-08-05. Review by: 2027-02-01.
Part of [Withdrawn and superseded ISO standards](https://referencesource.org/iso-standard-supersessions/).