Reference Source

ISO 16413:2013

For ISO 16413:2013, item title is Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting; status code is 9599; successor is ISO 16413:2020; withdrawn / published date is 2013-02-12, recorded from its source on 2026-08-05.

Identifier
ISO 16413:2013 verified
Item title
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting verified
Status code
9599 verified
Successor
ISO 16413:2020
Withdrawn / published date
2013-02-12 verified
Sourceisopublicstorageprod.blob.core.windows.net
Verified
Review by
DatasetWithdrawn and superseded ISO standards

What the source says

56703,IS,,ISO 16413:2013,"Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting","Évaluation de l'épaisseur, de la densité et de la largeur de l'interface des films fins par réflectrométrie de rayons X — Exigences instrumentales, alignement et positionnement, rassemblement des données, analyse des données et rapport",2013-02-12,1,"['71.040.40','35.240.70']",ISO/TC 201,9599,,[76403],['en'],30,"<p>ISO 16413:2013 specifies a method for the evaluation of thickness, density and interface width of single layer and multilayered thin films which have thicknesses be

isopublicstorageprod.blob.core.windows.net, retrieved 2026-08-05

Source

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