# ISO 16413:2013 — Withdrawn and superseded ISO standards

For ISO 16413:2013, item title is Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting; status code is 9599; successor is ISO 16413:2020; withdrawn / published date is 2013-02-12, recorded from its source on 2026-08-05.

- **Identifier:** ISO 16413:2013 _(verified: appears in the quote below)_
- **Item title:** Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting _(verified: appears in the quote below)_
- **Status code:** 9599 _(verified: appears in the quote below)_
- **Successor:** ISO 16413:2020
- **Withdrawn / published date:** 2013-02-12 _(verified: appears in the quote below)_

## What the source says

> 56703,IS,,ISO 16413:2013,"Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting","Évaluation de l'épaisseur, de la densité et de la largeur de l'interface des films fins par réflectrométrie de rayons X — Exigences instrumentales, alignement et positionnement, rassemblement des données, analyse des données et rapport",2013-02-12,1,"['71.040.40','35.240.70']",ISO/TC 201,9599,,[76403],['en'],30,"<p>ISO 16413:2013 specifies a method for the evaluation of thickness, density and interface width of single layer and multilayered thin films which have thicknesses be

## Source

- https://isopublicstorageprod.blob.core.windows.net/opendata/_latest/iso_deliverables_metadata/csv/iso_deliverables_metadata.csv

Last verified: 2026-08-05. Review by: 2027-02-01.
Part of [Withdrawn and superseded ISO standards](https://referencesource.org/iso-standard-supersessions/).