Reference Source

Trichlorosilane

For Trichlorosilane, cas no. is 10025-78-2; osha psm tq (lbs) is 5000, verified against its source on 2026-08-15.

Substance
Trichlorosilane verified
CAS No.
10025-78-2 verified
OSHA PSM TQ (lbs)
5000 verified
EPA RMP TQ (lbs)
10,000 per ecfr.gov
RMP category
flammable per ecfr.gov
RMP basis for listing
g per ecfr.gov
Sourceosha.gov
Verified
Review by
DatasetOSHA PSM vs EPA RMP: chemical threshold quantities side by side

What the source says

Trichlorosilane | 10025-78-2 | 5000

— osha.gov, retrieved 2026-08-15

What ecfr.gov says

Trichlorosilane [Silane, trichloro-] | 10025-78-2 | 10,000 | g

— ecfr.gov, retrieved 2026-08-15

Sources

Last verified against source: . Due for re-check by . This page as Markdown · OKF bundle · full dataset as JSON.