# Ethylene oxide — workplace exposure limit For Ethylene oxide, niosh rel (ppm) is C 5; niosh rel (mg/m³) is 9; cas no. is 75-21-8, verified against its source on 2026-09-08. - **Substance:** Ethylene oxide _(verified: appears in its own passage below)_ - **CAS No.:** 75-21-8 _(verified: appears in its own passage below)_ - **NIOSH REL (ppm):** C 5 _(verified: appears in the quote below)_ - **NIOSH REL (mg/m³):** 9 _(verified: appears in the quote below)_ - **PEL (ppm):** 1 _(per dir.ca.gov, not stated by the source above)_ - **PEL (mg/m³):** 2 _(per dir.ca.gov, not stated by the source above)_ - **STEL (ppm):** 5 _(per dir.ca.gov, not stated by the source above)_ ## What the source says > NIOSH REL Ca TWA <0.1 ppm (0.18 mg/m3) C 5 ppm (9 mg/m3) [10-min/day] ## Where each value comes from This source states these in separate places, so each value is shown with the passage that states it. ### Substance > CDC - NIOSH Pocket Guide to Chemical Hazards - Ethylene oxide ### CAS No. > CAS No. 75-21-8 ## What osha.gov says > Ethylene oxide; see 1910.1047 | 75-21-8 | - | - | - | Source: https://www.osha.gov/laws-regs/regulations/standardnumber/1910/1910.1000TableZ1 ## What dir.ca.gov says > 75218 | | Ethylene oxide; see Section 5220 | 1 | 2 | | 5 Source: https://www.dir.ca.gov/title8/5155.html ## Source - https://www.cdc.gov/niosh/npg/npgd0275.html - https://www.osha.gov/laws-regs/regulations/standardnumber/1910/1910.1000TableZ1 - https://www.dir.ca.gov/title8/5155.html Last verified: 2026-09-08. Review by: 2027-08-05. Part of [US workplace chemical exposure limits: federal OSHA, Cal/OSHA and NIOSH, side by side](https://referencesource.org/workplace-exposure-limits/).