# Dimethylethoxysilane — US workplace chemical exposure limits: federal OSHA vs Cal/OSHA, side by side

For Dimethylethoxysilane, pel (ppm) is 0.5; pel (mg/m³) is 2.1; stel (ppm) is 1.5; stel (mg/m³) is 6.4, verified against its source on 2026-08-05.

- **Substance:** Dimethylethoxysilane
- **PEL (ppm):** 0.5
- **PEL (mg/m³):** 2.1
- **STEL (ppm):** 1.5
- **STEL (mg/m³):** 6.4

## What the source says

> 14857342 | | Dimethylethoxysilane | 0.5 | 2.1 | | 1.5 | 6.4

## Source

- https://www.dir.ca.gov/title8/5155.html

Last verified: 2026-08-05. Review by: 2027-08-05.
Part of [US workplace chemical exposure limits: federal OSHA vs Cal/OSHA, side by side](https://referencesource.org/workplace-exposure-limits/).