---
type: threshold
id: silicon-tetrahydride-silane
asset: workplace-exposure-limits
title: "Silicon tetrahydride; silane — US workplace chemical exposure limits: federal OSHA vs Cal/OSHA, side by side"
sources:
  - https://www.dir.ca.gov/title8/5155.html
source_quote: "7803625 | | Silicon tetrahydride; silane | 5 | 7"
generated: true
harvested: 2026-08-05
stale_after: 2027-08-05
substance: "Silicon tetrahydride; silane"
pel_ppm: "5"
pel_mgm3: "7"
verified: true
---
**Substance:** Silicon tetrahydride; silane

**PEL (ppm):** 5

**PEL (mg/m³):** 7

> 7803625 | | Silicon tetrahydride; silane | 5 | 7

Source: <https://www.dir.ca.gov/title8/5155.html>