---
type: threshold
id: nitrogen-trifluoride
asset: workplace-exposure-limits
title: "Nitrogen trifluoride — US workplace chemical exposure limits: federal OSHA vs Cal/OSHA, side by side"
sources:
  - https://www.osha.gov/laws-regs/regulations/standardnumber/1910/1910.1000TableZ1
source_quote: "Nitrogen trifluoride | 7783-54-2 | 10 | 29 | - |"
generated: true
harvested: 2026-08-05
stale_after: 2027-08-05
substance: "Nitrogen trifluoride"
cas_number: "7783-54-2"
pel_ppm: "10"
pel_mgm3: "29"
verified: true
---
**Substance:** Nitrogen trifluoride

**CAS No.:** 7783-54-2

**PEL (ppm):** 10

**PEL (mg/m³):** 29

> Nitrogen trifluoride | 7783-54-2 | 10 | 29 | - |

Source: <https://www.osha.gov/laws-regs/regulations/standardnumber/1910/1910.1000TableZ1>