# ISO/TS 25138:2010 — Withdrawn and superseded ISO standards For ISO/TS 25138:2010, item title is Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry; status code is 9599; successor is ISO/TS 25138:2019; withdrawn / published date is 2010-11-22, recorded from its source on 2026-08-05. - **Identifier:** ISO/TS 25138:2010 _(verified: appears in the quote below)_ - **Item title:** Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry _(verified: appears in the quote below)_ - **Status code:** 9599 _(verified: appears in the quote below)_ - **Successor:** ISO/TS 25138:2019 - **Withdrawn / published date:** 2010-11-22 _(verified: appears in the quote below)_ ## What the source says > 42774,TS,,ISO/TS 25138:2010,Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry,Analyse chimique des surfaces — Analyse de films d'oxyde de métal par spectrométrie d'émission optique à décharge luminescente,2010-11-22,1,['71.040.40'],ISO/TC 201/SC 8,9599,,[74823],['en'],36,"

ISO/TS 25138:2010 describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

The method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg ## Source - https://isopublicstorageprod.blob.core.windows.net/opendata/_latest/iso_deliverables_metadata/csv/iso_deliverables_metadata.csv Last verified: 2026-08-05. Review by: 2027-02-01. Part of [Withdrawn and superseded ISO standards](https://referencesource.org/iso-standard-supersessions/).