# ISO/TR 15969:2001 — Withdrawn and superseded ISO standards

For ISO/TR 15969:2001, item title is Surface chemical analysis — Depth profiling — Measurement of sputtered depth; status code is 9599; successor is ISO/TR 15969:2021; withdrawn / published date is 2001-05-31, recorded from its source on 2026-08-05.

- **Identifier:** ISO/TR 15969:2001 _(verified: appears in the quote below)_
- **Item title:** Surface chemical analysis — Depth profiling — Measurement of sputtered depth _(verified: appears in the quote below)_
- **Status code:** 9599 _(verified: appears in the quote below)_
- **Successor:** ISO/TR 15969:2021
- **Withdrawn / published date:** 2001-05-31 _(verified: appears in the quote below)_

## What the source says

> 28872,TR,,ISO/TR 15969:2001,Surface chemical analysis — Depth profiling — Measurement of sputtered depth,Analyse chimique des surfaces — Profilage d'épaisseur — Mesurage de l'épaisseur bombardée,2001-05-31,1,['71.040.40'],ISO/TC 201/SC 4,9599,,[80118],['en'],12,<p>This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods</p><p>of sputtered depth measurement described in this Technical Report are applicable to techniques of surface</p><p>chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a</p><p>typical sputtered depth of up to severalmicrometres.</p>

## Source

- https://isopublicstorageprod.blob.core.windows.net/opendata/_latest/iso_deliverables_metadata/csv/iso_deliverables_metadata.csv

Last verified: 2026-08-05. Review by: 2027-02-01.
Part of [Withdrawn and superseded ISO standards](https://referencesource.org/iso-standard-supersessions/).