# ISO 25178-603:2013 — Withdrawn and superseded ISO standards

For ISO 25178-603:2013, item title is Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments; status code is 9599; successor is ISO 25178-603:2025; withdrawn / published date is 2013-09-25, recorded from its source on 2026-08-05.

- **Identifier:** ISO 25178-603:2013 _(verified: appears in the quote below)_
- **Item title:** Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments _(verified: appears in the quote below)_
- **Status code:** 9599 _(verified: appears in the quote below)_
- **Successor:** ISO 25178-603:2025
- **Withdrawn / published date:** 2013-09-25 _(verified: appears in the quote below)_

## What the source says

> 61236,IS,,ISO 25178-603:2013,Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments,Spécification géométrique des produits (GPS) — État de surface: Surfacique — Partie 603: Caractéristiques nominales des instruments sans contact (microscopes interférométriques à glissement de franges),2013-09-25,1,['17.040.20'],ISO/TC 213,9599,,[79675],"['en','fr']",28,<p>ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.</p>

## Source

- https://isopublicstorageprod.blob.core.windows.net/opendata/_latest/iso_deliverables_metadata/csv/iso_deliverables_metadata.csv

Last verified: 2026-08-05. Review by: 2027-02-01.
Part of [Withdrawn and superseded ISO standards](https://referencesource.org/iso-standard-supersessions/).