# ISO 16531:2013 — Withdrawn and superseded ISO standards

For ISO 16531:2013, item title is Surface chemical analysis — Depth profiling — Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS; status code is 9599; successor is ISO 16531:2020; withdrawn / published date is 2013-05-16, recorded from its source on 2026-08-05.

- **Identifier:** ISO 16531:2013 _(verified: appears in the quote below)_
- **Item title:** Surface chemical analysis — Depth profiling — Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS _(verified: appears in the quote below)_
- **Status code:** 9599 _(verified: appears in the quote below)_
- **Successor:** ISO 16531:2020
- **Withdrawn / published date:** 2013-05-16 _(verified: appears in the quote below)_

## What the source says

> 57058,IS,,ISO 16531:2013,Surface chemical analysis — Depth profiling — Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS,Analyse chimique des surfaces — Profilage d'épaisseur — Méthodes d'alignement du faisceau d'ions et la mesure associée de densité de courant ou de courant pour le profilage d'épaisseur en AES et XPS,2013-05-16,1,['71.040.40'],ISO/TC 201/SC 4,9599,,[77949],['en'],18,<p>ISO 16531:2013 specifies methods for the alignment of the ion beam to ensure good depth resolution in sputter depth profiling and optimal cleaning of surfaces when using inert gas ions in Auger electron spectroscopy and X-ray photoel

## Source

- https://isopublicstorageprod.blob.core.windows.net/opendata/_latest/iso_deliverables_metadata/csv/iso_deliverables_metadata.csv

Last verified: 2026-08-05. Review by: 2027-02-01.
Part of [Withdrawn and superseded ISO standards](https://referencesource.org/iso-standard-supersessions/).