# ISO 15632:2012 — Withdrawn and superseded ISO standards For ISO 15632:2012, item title is Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis; status code is 9599; successor is ISO 15632:2021; withdrawn / published date is 2012-07-31, recorded from its source on 2026-08-05. - **Identifier:** ISO 15632:2012 _(verified: appears in the quote below)_ - **Item title:** Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis _(verified: appears in the quote below)_ - **Status code:** 9599 _(verified: appears in the quote below)_ - **Successor:** ISO 15632:2021 - **Withdrawn / published date:** 2012-07-31 _(verified: appears in the quote below)_ ## What the source says > 52661,IS,,ISO 15632:2012,Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis,Analyse par microfaisceaux — Paramètres de performance instrumentale sélectionnés pour la spécification et le contrôle des spectromètres X à sélection d'énergie utilisés en microanalyse par sonde à électrons,2012-07-31,2,['71.040.99'],ISO/TC 202,9599,[27968],[78269],"['en','fr']",11,"

This International Standard defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing u ## Source - https://isopublicstorageprod.blob.core.windows.net/opendata/_latest/iso_deliverables_metadata/csv/iso_deliverables_metadata.csv Last verified: 2026-08-05. Review by: 2027-02-01. Part of [Withdrawn and superseded ISO standards](https://referencesource.org/iso-standard-supersessions/).