# ISO 15632:2002 — Withdrawn and superseded ISO standards

For ISO 15632:2002, item title is Microbeam analysis — Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors; status code is 9599; successor is ISO 15632:2012; withdrawn / published date is 2002-11-25, recorded from its source on 2026-08-05.

- **Identifier:** ISO 15632:2002 _(verified: appears in the quote below)_
- **Item title:** Microbeam analysis — Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors _(verified: appears in the quote below)_
- **Status code:** 9599 _(verified: appears in the quote below)_
- **Successor:** ISO 15632:2012
- **Withdrawn / published date:** 2002-11-25 _(verified: appears in the quote below)_

## What the source says

> 27968,IS,,ISO 15632:2002,Microbeam analysis — Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors,Analyse par microfaisceaux — Spécifications instrumentales pour spectromètres de rayons X à sélection d'énergie avec détecteurs à semi-conducteurs,2002-11-25,1,"['37.020','71.040.99']",ISO/TC 202,9599,,[52661],"['en','fr']",8,"<p>ISO 15632 defines the most important quantities that characterize an energy dispersive X-ray spectrometer (EDS) consisting of a semiconductor detector, a pre-amplifier and a signal processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on

## Source

- https://isopublicstorageprod.blob.core.windows.net/opendata/_latest/iso_deliverables_metadata/csv/iso_deliverables_metadata.csv

Last verified: 2026-08-05. Review by: 2027-02-01.
Part of [Withdrawn and superseded ISO standards](https://referencesource.org/iso-standard-supersessions/).