# ISO 14706:2000 — Withdrawn and superseded ISO standards

For ISO 14706:2000, item title is Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy; status code is 9599; successor is ISO 14706:2014; withdrawn / published date is 2000-12-21, recorded from its source on 2026-08-05.

- **Identifier:** ISO 14706:2000 _(verified: appears in the quote below)_
- **Item title:** Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy _(verified: appears in the quote below)_
- **Status code:** 9599 _(verified: appears in the quote below)_
- **Successor:** ISO 14706:2014
- **Withdrawn / published date:** 2000-12-21 _(verified: appears in the quote below)_

## What the source says

> 24337,IS,,ISO 14706:2000,Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy,Analyse chimique des surfaces — Détermination de la contamination en éléments à la surface des tranches de silicium par spectroscopie de fluorescence X à réflexion totale,2000-12-21,1,['71.040.40'],ISO/TC 201,9599,,[61870],['en'],23,

## Source

- https://isopublicstorageprod.blob.core.windows.net/opendata/_latest/iso_deliverables_metadata/csv/iso_deliverables_metadata.csv

Last verified: 2026-08-05. Review by: 2027-02-01.
Part of [Withdrawn and superseded ISO standards](https://referencesource.org/iso-standard-supersessions/).