# ISO 13084:2018 — Withdrawn and superseded ISO standards

For ISO 13084:2018, item title is Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer; status code is 9599; successor is ISO 13084:2025; withdrawn / published date is 2018-11-15, recorded from its source on 2026-08-05.

- **Identifier:** ISO 13084:2018 _(verified: appears in the quote below)_
- **Item title:** Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer _(verified: appears in the quote below)_
- **Status code:** 9599 _(verified: appears in the quote below)_
- **Successor:** ISO 13084:2025
- **Withdrawn / published date:** 2018-11-15 _(verified: appears in the quote below)_

## What the source says

> 73133,IS,,ISO 13084:2018,Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer,Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Étalonnage de l'échelle de masse pour un spectromètre de masse des ions secondaires à temps de vol,2018-11-15,2,['71.040.40'],ISO/TC 201/SC 6,9599,[52695],[90332],['en'],15,<p>This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular in

## Source

- https://isopublicstorageprod.blob.core.windows.net/opendata/_latest/iso_deliverables_metadata/csv/iso_deliverables_metadata.csv

Last verified: 2026-08-05. Review by: 2027-02-01.
Part of [Withdrawn and superseded ISO standards](https://referencesource.org/iso-standard-supersessions/).