# ISO 11952:2014 — Withdrawn and superseded ISO standards

For ISO 11952:2014, item title is Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems; status code is 9599; successor is ISO 11952:2019; withdrawn / published date is 2014-05-12, recorded from its source on 2026-08-05.

- **Identifier:** ISO 11952:2014 _(verified: appears in the quote below)_
- **Item title:** Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems _(verified: appears in the quote below)_
- **Status code:** 9599 _(verified: appears in the quote below)_
- **Successor:** ISO 11952:2019
- **Withdrawn / published date:** 2014-05-12 _(verified: appears in the quote below)_

## What the source says

> 51061,IS,,ISO 11952:2014,Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems,Analyse chimique des surfaces — Microscopie à sonde à balayage — Détermination des quantités géométriques en utilisant des microscopes à sonde à balayage: Étalonnage des systèmes de mesure,2014-05-12,1,['71.040.40'],ISO/TC 201/SC 9,9599,,[67552],['en'],58,"<p>ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where

## Source

- https://isopublicstorageprod.blob.core.windows.net/opendata/_latest/iso_deliverables_metadata/csv/iso_deliverables_metadata.csv

Last verified: 2026-08-05. Review by: 2027-02-01.
Part of [Withdrawn and superseded ISO standards](https://referencesource.org/iso-standard-supersessions/).